Title :
The optimization of mechanical harmonic modes of the 75 g balanced weight distribution capacitive accelerometer
Author :
Tamsir, Agus Santoso ; Saharil, Farizah ; Majlis, Burhanuddin Yeop
Author_Institution :
Fac. of Eng., Univ. Kebangsaan Malaysia, Selangor, Malaysia
Abstract :
The harmonic modes of movable proof-mass of differential capacitive accelerometer plays an important role in design. Another modes except main mode must be minimized to avoid uncertainty value of capacitance. In this paper, we tried to optimize the differential capacitive accelerometer using the variation of the length of finger attached at the proof mass. The length of finger varies from 40 μm to 240 μm with the variation of the width of proof-mass from 10 μm to 40 μm. The results have shown that the need to choose the length of finger for minimizing the effect of harmonic modes is as greater than 140 μm assuming the external forces distributed in the interval of 0 to 1 MHz.
Keywords :
accelerometers; capacitance; 10 to 240 micron; 75 g; capacitance; differential capacitive accelerometer; mechanical harmonic modes; movable proof-mass; weight distribution; Accelerometers; Automotive engineering; Design engineering; Fingers; Laboratories; Manufacturing; Microelectronics; Micromechanical devices; Sensor systems; Uncertainty;
Conference_Titel :
Semiconductor Electronics, 2002. Proceedings. ICSE 2002. IEEE International Conference on
Print_ISBN :
0-7803-7578-5
DOI :
10.1109/SMELEC.2002.1217879
