Smart nanostructure derived by low energy cluster beam deposition

Smart nanostructures such as magnetostrictive and magnetoelectric films have drawn a continually interest due to their potential applications in the micro-electro-mechanical system devices. We have developed an effective preparation method, namely low energy cluster beam deposition to prepare the cluster-assembled Tb-Fe nanofilms. A well-defined Tb-Fe nanostructured film has been obtained, which exhibits excellent magnetostriction, much higher than the common Tb-Fe films. Then the Tb-Fe nanocluster beam was deposited onto the surface of the PZT film through the open holes of the mask. Thus, the Tb-Fe/PZT magnetoelectric composite film has been prepared successfully. One observes that the interface between Tb-Fe and PZT layers is clear and no transition layer is observed. The composite film exhibits good ferromagnetic properties, and the strong magnetoelectric effect was observed in the composite film.