Title :
Research on low frequency miniature vector hydrophone technology based on MEMS technology
Author :
Meng, Hong ; Chen, Li-jie ; Xu, Xin-ran
Author_Institution :
Hangzhou Appl. Acoust. Res. Inst., Hangzhou, China
Abstract :
In this paper, the MEMS technique is implemented in the design and manufacture of vector hydrophone. The micromechanical structure design technique, working principle and workmanship of sensing chip in vector hydrophone are introduced. A model of double cantilever beam structure is analyzed. Based on the theoretical work, a three dimensional vector hydrophone is manufactured, and the acoustical performance of it is also tested.
Keywords :
hydrophones; micromechanical devices; microsensors; vectors; MEMS technology; acoustical performance; double cantilever beam structure; micromechanical structure design technique; sensing chip; three-dimensional vector hydrophone; Acoustic sensors; Acoustic testing; Frequency; Glass; Micromechanical devices; Piezoresistance; Pulp manufacturing; Sonar equipment; Structural beams; MEMS technology; miniature sensor; piezoresistance effect; vector hydrophone;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) and 2009 China Symposium on Frequency Control Technology, Joint Conference of the 2009 Symposium on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-4950-7
DOI :
10.1109/SPAWDA.2009.5428899
