Inverse scattering problem in pseudopulse diagnostics of periodic structures

The dual regularization method is applied in the inverse problem of electromagnetic scattering to retrieve permittivity inhomogeneities in multilayer periodic dielectric structures by the pseudopulse synthesized from multifrequency reflectometry measurements. Based on the developed theory, the solution algorithm has been worked out and applied in the numerical simulation of this reflectometry diagnostics of inhomogeneities in multilayer structures of X-ray optics.