Inverse scattering problem in pseudopulse diagnostics of periodic structures

Author

Gaikovich, K.P. ; Gaikovich, P.K. ; Sumin, M.I.

Author_Institution

Inst. for Phys. of Microstruct., Nizhny Novgorod, Russia

fYear

2012

fDate

28-30 Aug. 2012

Firstpage

390

Lastpage

393

Abstract

The dual regularization method is applied in the inverse problem of electromagnetic scattering to retrieve permittivity inhomogeneities in multilayer periodic dielectric structures by the pseudopulse synthesized from multifrequency reflectometry measurements. Based on the developed theory, the solution algorithm has been worked out and applied in the numerical simulation of this reflectometry diagnostics of inhomogeneities in multilayer structures of X-ray optics.

Keywords

X-ray optics; electromagnetic wave scattering; inverse problems; numerical analysis; optical multilayers; periodic structures; permittivity; reflectometry; X-ray optics; dual regularization method; electromagnetic scattering; inverse scattering problem; multifrequency reflectometry measurements; multilayer periodic dielectric structures; multilayer structures; numerical simulation; permittivity inhomogeneities; pseudopulse diagnostics; Electromagnetics; Inverse problems; Nonhomogeneous media; Periodic structures; Permittivity; Reflectometry; Scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Mathematical Methods in Electromagnetic Theory (MMET), 2012 International Conference on

Conference_Location

Kyiv

ISSN

2161-1734

Print_ISBN

978-1-4673-4478-4

Type

conf

DOI

10.1109/MMET.2012.6331201

Filename

6331201