Title :
Surface Micromachined Accelerometer based On A Torsional Moving Structure
Author :
Fricke, J. ; Obermeier, E.
Keywords :
Acceleration; Accelerometers; Built-in self-test; Capacitance; Capacitive sensors; Capacitors; Electrodes; Mechanical sensors; Micromachining; Shape;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721888
