DocumentCode

1810818

Title

Surface Micromachined Accelerometer based On A Torsional Moving Structure

Author

Fricke, J. ; Obermeier, E.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

542

Lastpage

545

Keywords

Acceleration; Accelerometers; Built-in self-test; Capacitance; Capacitive sensors; Capacitors; Electrodes; Mechanical sensors; Micromachining; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721888

Filename

721888