مرکز منطقه ای اطلاع رساني علوم و فناوري - Three-axis Capacitive Accelerometer With Uniform Axial Sensitivities

DocumentCode :

1810910

Title :

Three-axis Capacitive Accelerometer With Uniform Axial Sensitivities

Author :

Mineta, T. ; Kobayashi, S. ; Watanabe, Y. ; Kanauchi, S. ; Nakagawa, I. ; Suganurna, E. ; Esashi, M.

Volume :

fYear :

1995

fDate :

25-29 June 1995

Firstpage :

554

Lastpage :

557

Keywords :

Acceleration; Accelerometers; Capacitance; Electrodes; Glass; Gravity; Micromachining; Particle beams; Silicon; Springs;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location :

Stockholm, Sweden

Print_ISBN :

91-630-3473-5

Type :

conf

DOI :

10.1109/SENSOR.1995.721891

Filename :

721891

Link To Document :