Title :
Observation Of Non-lineareffects In The Resonance Behaviour Of A Micromachined Silicon Accelerometer
Author :
Mück, G. ; Müller, G. ; Kupke, W. ; Navé, P. ; Seidel, H.
Keywords :
Accelerometers; Damping; Frequency; Oscillators; Piezoresistive devices; Resonance; Silicon; Structural beams; Suspensions; Vibrations;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721893
