DocumentCode
1811009
Title
A Pressure Sensor Based On A Nitride Membrane Using Single Crystalline Piezoresistors
Author
Folkmer, Bernd ; Steiner, Peter ; Lang, Walter
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
574
Lastpage
577
Keywords
Biomembranes; Crystallization; Etching; Fabrication; Mechanical sensors; Piezoresistive devices; Sensor phenomena and characterization; Silicon; Thermal sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721896
Filename
721896
Link To Document