DocumentCode
1811032
Title
Differential Pressure Sensor With Micromachined Overrange Protectors
Author
Watanabe, Tetsuya ; Fukuhara, Satoshi ; Tsukamoto, Hideo ; Kudo, Takahiro ; Ikeda, Kyoichi
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
578
Lastpage
581
Keywords
Bonding; Electrodes; Glass; Hermetic seals; Mechanical sensors; Micromachining; Piezoresistance; Protection; Semiconductor device measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721897
Filename
721897
Link To Document