Title :
A Laterally Driven Micromachined Resonant Pressure Sensor
Author :
Welham, Christopher J. ; Gardne, Julian W. ; Greenwood, John
Keywords :
Boron; Capacitive sensors; Etching; Force sensors; Frequency; Micromachining; Q factor; Resonance; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721899
