DocumentCode
1811096
Title
Micromachined silicon accelerometers for inertial sensing
Author
Jones, R.E.
Author_Institution
Lucas Control Syst. Products, Solihull, UK
fYear
1994
fDate
34346
Firstpage
42583
Lastpage
42586
Abstract
Accelerometers are used to provide the attitude reference for a variety of navigation systems including strapdown heading sensors, and also for a number of other inertial sensing applications. Accelerometer technology ranges from highly accurate but rather costly servo devices through to simple open-loop components which are used in less demanding applications. In recent years accelerometers have been produced using the technique of silicon micromachining, and these devices are now being produced in large quantities, principally for the automotive market
Keywords
accelerometers; inertial navigation; machining; semiconductor devices; silicon; Si; attitude reference; automotive market; inertial sensing applications; micromachined silicon accelerometers; navigation systems; open-loop components; servo devices; strapdown heading sensors;
fLanguage
English
Publisher
iet
Conference_Titel
Heading Sensors for Sonar and Marine Applications, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
284693
Link To Document