DocumentCode
1811098
Title
Integrated Mach-zehnder Interferometer Pressure Transducer
Author
Hoppe, E. ; Andersen, L.U.A. ; Bouwstra, S.
Volume
2
fYear
1995
fDate
25-29 Jun 1995
Firstpage
590
Lastpage
591
Keywords
Biomembranes; Capacitive sensors; Electromagnetic waveguides; Etching; Optical device fabrication; Optical interferometry; Optical sensors; Optical waveguides; Shape; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721900
Filename
721900
Link To Document