Title :
A high pressure resonant sensor
Author_Institution :
Druck Ltd., Leicester, UK
Abstract :
The author developed a silicon resonant sensor for measuring pressures up to 7000 psi. The micromachined resonator is bonded to a thick silicon diaphragm and is excited electrostatically. The resolution is better than 100 ppm
Keywords :
pressure sensors; semiconductor devices; Si; electrostatic excitation; high pressure resonant sensor; micromachined resonator; pressure measurement; silicon diaphragm;
Conference_Titel :
Heading Sensors for Sonar and Marine Applications, IEE Colloquium on
Conference_Location :
London
