Title :
Pressure Microsensors Using P-type Diamond Films
Author :
Sahli, Sondes ; Aslam, M.
Keywords :
Conductivity; Doping; Electrical resistance measurement; Flanges; Microsensors; Piezoresistance; Powders; Pressure measurement; Rapid thermal annealing; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721901
