• DocumentCode
    1811274
  • Title

    Analysis And Design Concept Of Highly Sensitive Silicon Gyroscope

  • Author

    Maenaka, Kazusuke ; Konishi, Yasushi ; Fujita, Takayuki ; Maeda, Muneo

  • Volume
    2
  • fYear
    1995
  • fDate
    25-29 June 1995
  • Firstpage
    612
  • Lastpage
    615
  • Keywords
    Circuit stability; Gyroscopes; Mechanical sensors; Open loop systems; Resonance; Resonant frequency; Silicon; Structural beams; Transient response; Vibration measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Conference_Location
    Stockholm, Sweden
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.721906
  • Filename
    721906