DocumentCode
1811274
Title
Analysis And Design Concept Of Highly Sensitive Silicon Gyroscope
Author
Maenaka, Kazusuke ; Konishi, Yasushi ; Fujita, Takayuki ; Maeda, Muneo
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
612
Lastpage
615
Keywords
Circuit stability; Gyroscopes; Mechanical sensors; Open loop systems; Resonance; Resonant frequency; Silicon; Structural beams; Transient response; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721906
Filename
721906
Link To Document