Title :
Frequency Stabilisation Of Electrostatic Oscillators
Author :
Turner, G.C. ; Andrews, M.K.
Keywords :
Electrostatics; Force sensors; Microsensors; Nonlinear equations; Oscillators; Research and development; Resonance; Resonant frequency; Silicon; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721909