Title :
Resonant Microibeam Accelerometers
Author :
Bums, E.W. ; Homing, R.D. ; Herb, W.R. ; Zook, J.D. ; Guckel, H.
Keywords :
Acceleration; Accelerometers; Damping; Frequency; Micromachining; Piezoresistance; Resonance; Silicon; Stability; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721918
