DocumentCode

1811543

Title

Resonant Microibeam Accelerometers

Author

Bums, E.W. ; Homing, R.D. ; Herb, W.R. ; Zook, J.D. ; Guckel, H.

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

659

Lastpage

662

Keywords

Acceleration; Accelerometers; Damping; Frequency; Micromachining; Piezoresistance; Resonance; Silicon; Stability; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721918

Filename

721918