Title :
A Novel Accelerometer Using Silicon Micromachined Cantilever Supported Optical Grid And Pin Protodetector
Author :
Huang, Ruey Shing ; Abbaspour-Sani, Ebrahim ; Kwok, Chee Yee
Keywords :
Acceleration; Accelerometers; Etching; Geometrical optics; Light emitting diodes; Nonlinear optics; Optical sensors; Photodetectors; Silicon; Strips;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721919
