A Miniature, High-sensitivity, Electron Tunneling Accelerometer

Author

Rockstad, Howard K. ; Reynolds, J.K. ; Tang, T.K. ; Kenny, T.W. ; Kaiser, W.J. ; Gabrielson, Thomas B.

Volume

fYear

1995

fDate

25-29 June 1995

Firstpage

675

Lastpage

678

Keywords

Accelerometers; Aircraft propulsion; Bandwidth; Electrons; Prototypes; Resonant frequency; Silicon; Space technology; Transducers; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721922

Filename

721922

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