Title :
A Miniature, High-sensitivity, Electron Tunneling Accelerometer
Author :
Rockstad, Howard K. ; Reynolds, J.K. ; Tang, T.K. ; Kenny, T.W. ; Kaiser, W.J. ; Gabrielson, Thomas B.
Keywords :
Accelerometers; Aircraft propulsion; Bandwidth; Electrons; Prototypes; Resonant frequency; Silicon; Space technology; Transducers; Tunneling;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721922
