Fabrication And Characterization Of A Silicon Capacitive Structure For Simultaneous Detection Of Acceleration And Angular Rate

Author

Mizuno, Jun ; Nottineyer, K. ; Cabuz, Cleopatra ; Kobayashi, Takashi ; Esashi, Masayoshi

Volume

fYear

1995

fDate

25-29 June 1995

Firstpage

679

Lastpage

682

Keywords

Acceleration; Bars; Electrodes; Fabrication; Mechanical sensors; Mechatronics; Motion control; Motion detection; Silicon; Weight control;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.721923

Filename

721923

Link To Document