Title :
Fabrication And Characterization Of A Silicon Capacitive Structure For Simultaneous Detection Of Acceleration And Angular Rate
Author :
Mizuno, Jun ; Nottineyer, K. ; Cabuz, Cleopatra ; Kobayashi, Takashi ; Esashi, Masayoshi
Keywords :
Acceleration; Bars; Electrodes; Fabrication; Mechanical sensors; Mechatronics; Motion control; Motion detection; Silicon; Weight control;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721923
