DocumentCode :
1811676
Title :
Three Dimensional Vector Accelerometer Using Soi Structure For High Temperature
Author :
Takao, Hidekuni ; Matsumoto, Yoshinori ; Seo, Hee-Don ; Tanaka, Hidekazu ; Ishida, Makaoto ; Nakamura, Tetsuro
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
683
Lastpage :
686
Keywords :
Acceleration; Accelerometers; Circuits; Leakage current; Piezoresistance; Piezoresistive devices; Silicon; Temperature distribution; Temperature sensors; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721924
Filename :
721924
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1811676
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