DocumentCode :
1811697
Title :
Highly Reliable Silicon 1%41cro-machined Physical Sensors In Mass Production
Author :
Sasayama, Takao ; Suzuki, Seikoo ; Tsuchitaii, S. ; Koide, Akira ; Suzuki, Masayoshi ; Nakazawa, Terumi ; Ichikawa, N.
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
687
Lastpage :
690
Keywords :
Acceleration; Anisotropic magnetoresistance; Capacitance; Capacitive sensors; Electrodes; Etching; Mass production; Sensor phenomena and characterization; Sensor systems; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721925
Filename :
721925
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1811697
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