DocumentCode
1811697
Title
Highly Reliable Silicon 1%41cro-machined Physical Sensors In Mass Production
Author
Sasayama, Takao ; Suzuki, Seikoo ; Tsuchitaii, S. ; Koide, Akira ; Suzuki, Masayoshi ; Nakazawa, Terumi ; Ichikawa, N.
Volume
2
fYear
1995
fDate
25-29 June 1995
Firstpage
687
Lastpage
690
Keywords
Acceleration; Anisotropic magnetoresistance; Capacitance; Capacitive sensors; Electrodes; Etching; Mass production; Sensor phenomena and characterization; Sensor systems; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721925
Filename
721925
Link To Document