Title :
Acceleration Microswitches With Adjustable Snapping Threshold
Author :
Go, Jeung Sang ; Cho, Young-Ho ; Kwak, Byung Man
Keywords :
Acceleration; Biomembranes; Electrodes; Etching; Fabrication; Microswitches; Residual stresses; Silicon; Switches; Threshold voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721926
