DocumentCode

1811776

Title

Design Of A Silicon Microphone With Differential Read-out Of A Sealed Double Parallel-plate Capacitor

Author

Bay, Jesper ; Hansen, Ole ; Bouwstra, Siebe

Volume

2

fYear

1995

fDate

25-29 June 1995

Firstpage

700

Lastpage

703

Keywords

Analytical models; Capacitance; Capacitors; Hearing aids; Microelectronics; Microphones; Packaging; Silicon; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Conference_Location

Stockholm, Sweden

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.721928

Filename

721928