DocumentCode :
1811961
Title :
Humidity-dependent Mechanical Properties Of Polyimide Films And Their Use For Ic-comtatible Humidity Sensors
Author :
Sager, Karsten ; Schroth, Andreas ; Gerlach, Gerald
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
736
Lastpage :
739
Keywords :
Capacitive sensors; Chemical processes; Chemical sensors; Chemical technology; Humidity measurement; Mechanical factors; Mechanical sensors; Piezoresistance; Polyimides; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721937
Filename :
721937
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1811961
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