Millimeter-wave design of aperture-coupled micromachined patch antennas

An aperture-coupled patch antenna using micromachining technology on high resistivity silicon substrates has been studied in this paper. A finite ground coplanar waveguide-microstrip line (FGCPW-MS) is used to feed this antenna. The effects of varying several key physical parameters of the structure are investigated to get the maximum improvement in bandwidth and HFSS software is used to optimize this model. The simulated results show that bandwidth of 6.34%, gain of 5.8 dB and efficiency of 74% has been achieved. Fabrication is done using micromachining technologies. And due to fabrication error and measurement method the measured results show a bandwidth of 4.19%. However, it still shows good agreement in simulation and measurement. Besides its small physical size, this kind of antenna is also easy to integrate with other active components.