A greedy heuristic for locating crossovers in conveyor-based AMHS in wafer fabs

Author

Johnson, Andrew ; Carlo, Hector J. ; Jimenez, Jesus A. ; Nazzal, Dima ; Lasrado, Vernet

Author_Institution

Dept. of Ind. & Syst. Eng., Texas A&M Univ., College Station, TX, USA

fYear

2009

fDate

13-16 Dec. 2009

Firstpage

1667

Lastpage

1676

Abstract

Finding the optimal layout of Automated Material Handling Systems (AMHS) is critical for the design of next generation semiconductor wafer fabs. This paper proposes a greedy heuristic to determine the configuration of a conveyor-based AMHS featuring turntables and crossovers. Using a conveyor-based analytical model, the heuristic identifies the crossover that provides the greater benefit in terms of work-in process and delivery time reduction. The virtual SEMATECH 300 mm fab is used to demonstrate the application of the heuristic. Numerical results show that adding crossovers reduced the system´s delivery time by up to 22-percent in the scenarios under consideration.

Keywords

conveyors; decision making; integrated circuit design; integrated circuit manufacture; semiconductor industry; automated material handling system; conveyor based AMHS; crossovers location; delivery time reduction; greedy heuristic; semiconductor wafer fabs; turntables; virtual SEMATECH 300 mm fab; Analytical models; Cost function; Delay estimation; Engineering management; Industrial engineering; Materials handling; Semiconductor device modeling; Systems engineering and theory; Throughput; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation Conference (WSC), Proceedings of the 2009 Winter

Conference_Location

Austin, TX

Print_ISBN

978-1-4244-5770-0

Type

conf

DOI

10.1109/WSC.2009.5429177

Filename

5429177