• DocumentCode
    1813875
  • Title

    Development of deformable mirror for spherical aberration compensation

  • Author

    Aoki, Sunao ; Yamada, Masahiro ; Yamagami, Tamotsu

  • Author_Institution
    Home Syst. Dev. Div., Sony Corp., Tokyo
  • fYear
    2009
  • fDate
    10-13 May 2009
  • Firstpage
    90
  • Lastpage
    92
  • Abstract
    By using conventional MEMS processes, we have successfully developed a high accuracy and easily controllable deformable mirror with simple structure. Furthermore, we have obtained a reflective film of low stress which was a challenge.
  • Keywords
    aberrations; adaptive optics; micro-optomechanical devices; micromirrors; optical disc storage; optical films; MEMS processes; deformable mirror; high-density optical disc systems; reflective film; spherical aberration compensation; Micromechanical devices; Mirrors; Optical films; Optical surface waves; Reflectivity; Semiconductor films; Shape; Silicon; Stress; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Data Storage Topical Meeting, 2009. ODS '09.
  • Conference_Location
    Lake Buena Vista, FL
  • Print_ISBN
    978-1-4244-3342-1
  • Electronic_ISBN
    978-1-4244-3343-8
  • Type

    conf

  • DOI
    10.1109/ODS.2009.5031764
  • Filename
    5031764
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1813875