Fabry-Perot laser diodes and DFB laser diodes emitting at 2.6μM for absorption spectroscopy

Author

Barat, D. ; Vicet, A. ; Angellier, J. ; Rouillard, Y. ; Le Gratiet, L. ; Guilet, S. ; Martinez, A. ; Ramdane, A.

Author_Institution

CNRS, Univ. Montpellier 2, Montpellier

fYear

2008

fDate

25-29 May 2008

Firstpage

1

Lastpage

3

Abstract

We report on FP and DFB semiconductor lasers based on GaInAsSb/AlGaAsSb quantum wells, grown by molecular beam epitaxy. The devices were processed by wet etching or inductively coupled plasma process. Electron beam lithography was used to deposit a metal Bragg grating on each side of the laser ridge to fabricate DFB lasers. The devices all operate in the continuous wave regime at room temperature with a single frequency emission above 2.6 mum and good tuning properties, making them well adapted to tunable diode laser absorption spectroscopy.

Keywords

Bragg gratings; III-V semiconductors; aluminium compounds; distributed feedback lasers; electron beam lithography; etching; gallium arsenide; gallium compounds; indium compounds; molecular beam epitaxial growth; plasma materials processing; quantum well lasers; semiconductor quantum wells; DFB semiconductor lasers; Fabry-Perot laser diodes; GaInAsSb-AlGaAsSb; electron beam lithography; inductively coupled plasma process; metal Bragg grating; molecular beam epitaxy; quantum wells; temperature 293 K to 298 K; tunable diode laser absorption spectroscopy; tuning property; wavelength 2.6 mum; wet etching; Absorption; Diode lasers; Fabry-Perot; Laser tuning; Molecular beam epitaxial growth; Plasma temperature; Quantum well lasers; Semiconductor lasers; Spectroscopy; Wet etching; DFB Lasers; gas sensing; metal grating; mid-infrared region;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on

Conference_Location

Versailles

ISSN

1092-8669

Print_ISBN

978-1-4244-2258-6

Electronic_ISBN

1092-8669

Type

conf

DOI

10.1109/ICIPRM.2008.4702992

Filename

4702992