Simulation of a full 300mm semiconductor manufacturing plant with material handling constraints

Generally, simulation models encountered in the literature in the context of semiconductor manufacturing are obtained with many assumptions (aggregations) and from partial model simulation of the facility (also called fab). The results obtained can be satisfactory for certain types of studies but, when precise results and understanding of the detailed behavior of local or global parts of the fab are needed, these simplifications may no longer be adequate. A more detailed model and a full-scale simulation are then needed. This article presents a detailed simulation model of the production system and Automated Material Handling System for a 300 mm semiconductor plant. Some of the studies performed with this model are discussed.