DocumentCode :
1815201
Title :
Diamond-like photonic crystals by holographic lithography
Author :
Turberfield, A.J.
Author_Institution :
Clarendon Lab., Oxford Univ., UK
fYear :
2001
fDate :
11-11 May 2001
Firstpage :
13
Abstract :
Summary form only given. Holographic lithography is a general and flexible technique for the fabrication of three-dimensional photonic crystals. Three-dimensional microstructure is generated when a four-beam laser interference pattern is used to expose a thick layer of photoresist. Highly exposed regions in the resulting three-dimensional intensity grating are rendered insoluble; unexposed areas are then dissolved away to produce a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. This technique is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum.
Keywords :
holography; laser beams; light interference; optical polymers; photonic band gap; photoresists; 3D microstructure; 3D photonic crystals; air-filled voids; cross-linked polymer; diamond-like photonic crystals; four-beam laser interference pattern; highly exposed regions; holographic lithography; photoresist; polymeric structure; sub-micron periodicity; thick layer; three-dimensional intensity grating; Gratings; Holography; Interference; Lithography; Microstructure; Optical device fabrication; Photonic crystals; Polymers; Production; Resists;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Quantum Electronics and Laser Science Conference, 2001. QELS '01. Technical Digest. Summaries of Papers Presented at the
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-663-X
Type :
conf
DOI :
10.1109/QELS.2001.961783
Filename :
961783
Link To Document :
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