Title :
Pt/TiO2 nanotubes/SiC schottky diodes for hydrogen gas sensing applications
Author :
Shafiei, Mahnaz ; Sadek, Abu Z. ; Yu, Jerry ; Arsat, Rashidah ; Latham, Kay ; Kalantar-zadeh, Kourosh ; Wlodarski, Wojtek
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, VIC, Australia
Abstract :
Titanium oxide nanotubes Schottky diodes were fabricated for hydrogen gas sensing applications. The TiO2 nanotubes were synthesized via anodization of RF sputtered titanium films on SiC substrates. Two anodization potentials of 5 V and 20 V were used. Scanning electron microscopy of the synthesized films revealed nanotubes with avarage diameters of 20 nm and 75 nm. X-ray diffraction analysis revealed that the composition of the oxide varied with the anodization potential. TiO2 (anatase) being formed preferentially at 5 V and TiO (no anatase) at 20 V. Current-voltage characteristics of the diodes were studied towards hydrogen at temperatures from 25°C to 250°C. At constant current bias of -500 μA and 250°C, the lateral voltage shifts of 800 mV and 520 mV were recorded towards 1% hydrogen for the 5 V and 20 V anodized nanotubes, respectively.
Keywords :
Schottky diodes; X-ray diffraction; anodisation; gas sensors; nanofabrication; platinum; scanning electron microscopy; semiconductor nanotubes; semiconductor-metal boundaries; silicon compounds; sputter deposition; titanium compounds; wide band gap semiconductors; Current-voltage characteristics; Pt-TiO2-SiC; RF sputtered titanium films; Scanning electron microscopy; SiC; SiC substrates; X-ray diffraction analysis; anodization; current -500 muA; hydrogen gas sensing applications; synthesized films; temperature 25 degC to 250 degC; titanium oxide nanotubes Schottky diodes; voltage 20 V; voltage 5 V; Films; Gas detectors; Nanotubes; Schottky diodes; Silicon carbide; Titanium; Schottky diode; TiO2 nanotubes; gas sensor; hydrogen; reverse bias;
Conference_Titel :
Nanoscience and Nanotechnology (ICONN), 2010 International Conference on
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4244-5261-3
Electronic_ISBN :
978-1-4244-5262-0
DOI :
10.1109/ICONN.2010.6045175
