Title :
Excimer lasers for micromachining
Author :
Harvey, E.C. ; Rumsby, P.T. ; Gower, M.C. ; Mihailov, S. ; Thomas, D.
Abstract :
The authors discuss the problem of the design of the optical beam delivery system in excimer laser micromachining. The authors´ solutions are described and examples of machining structures and shaped holes, for a large variety of products, are presented
Conference_Titel :
Microengineering and Optics, IEE Colloquium on
Conference_Location :
London
