DocumentCode
1815661
Title
Curriculum development in control of semiconductor manufacturing under an NSF combined research-curriculum grant
Author
Khargonekar, Pramod P. ; Terry, Fred L., Jr.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume
3
fYear
1999
fDate
1999
Firstpage
3024
Abstract
In this paper, we describe our NSF sponsored research-curriculum program devoted to the topic of modeling and control of semiconductor manufacturing. The paper is focused for the most part on the curriculum development under this program
Keywords
educational courses; production control; semiconductor device manufacture; NSF; curriculum development; modeling; production control; research-curriculum program; semiconductor manufacturing; Curriculum development; Feedback control; Manufacturing processes; Microelectronics; Plasma applications; Plasma chemistry; Plasma materials processing; Process control; Semiconductor device manufacture; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Decision and Control, 1999. Proceedings of the 38th IEEE Conference on
Conference_Location
Phoenix, AZ
ISSN
0191-2216
Print_ISBN
0-7803-5250-5
Type
conf
DOI
10.1109/CDC.1999.831398
Filename
831398
Link To Document