DocumentCode
1815722
Title
Polymer Coated Capacitive Microintegrated Gas Sensor
Author
Steiner, F.-P. ; Hierlemann, Andreas ; Cornila, C. ; Noetzel, G. ; Bächtold, M. ; Korvink, J.G. ; Göpel, W. ; Baltes, H.
Author_Institution
Physical Electronics Laboratory, ETH Zurich
Volume
2
fYear
1995
fDate
25-29 Jun 1995
Firstpage
814
Lastpage
817
Keywords
Capacitance; Capacitive sensors; Chemical sensors; Chemical technology; Dielectrics; Electrodes; Gas detectors; Pollution measurement; Polymer films; Supercapacitors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.721963
Filename
721963
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