• DocumentCode
    1816777
  • Title

    Fabrication of micro-nanoprojection arrays and the effect of morphing on the needle profile

  • Author

    Aljada, Muhsen ; Jenkins, Derek W K ; Flaim, Christopher ; Corrie, Simon ; Kendall, Mark A F

  • Author_Institution
    Australian Inst. for Bioeng. & Nanotechnol., Univ. of Queensland, Brisbane, QLD, Australia
  • fYear
    2010
  • fDate
    22-26 Feb. 2010
  • Firstpage
    274
  • Lastpage
    277
  • Abstract
    In this paper we demonstrate the fabrication of silicon microneedle arrays for vaccine delivery using deep reactive ion etching. Three different scenarios have been investigated to study the effect of morphing the gas flow of SF6/C4F8 during the etching process. Results show that morphing the flow rate of SF6/C4F8 has a significant impact on the needles´ shape and size.
  • Keywords
    elemental semiconductors; microfabrication; silicon; sputter etching; Si; deep reactive ion etching; gas flow rate; micro-nanoprojection arrays; morphing; silicon microneedle arrays; vaccine delivery; Etching; Fabrication; Fluid flow; Needles; Radio frequency; Silicon; Sulfur hexafluoride; deep reactive ion etching; microneedle arrays; vaccine delivery;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoscience and Nanotechnology (ICONN), 2010 International Conference on
  • Conference_Location
    Sydney, NSW
  • Print_ISBN
    978-1-4244-5261-3
  • Electronic_ISBN
    978-1-4244-5262-0
  • Type

    conf

  • DOI
    10.1109/ICONN.2010.6045229
  • Filename
    6045229
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1816777