Title :
Fabrication of micro-nanoprojection arrays and the effect of morphing on the needle profile
Author :
Aljada, Muhsen ; Jenkins, Derek W K ; Flaim, Christopher ; Corrie, Simon ; Kendall, Mark A F
Author_Institution :
Australian Inst. for Bioeng. & Nanotechnol., Univ. of Queensland, Brisbane, QLD, Australia
Abstract :
In this paper we demonstrate the fabrication of silicon microneedle arrays for vaccine delivery using deep reactive ion etching. Three different scenarios have been investigated to study the effect of morphing the gas flow of SF6/C4F8 during the etching process. Results show that morphing the flow rate of SF6/C4F8 has a significant impact on the needles´ shape and size.
Keywords :
elemental semiconductors; microfabrication; silicon; sputter etching; Si; deep reactive ion etching; gas flow rate; micro-nanoprojection arrays; morphing; silicon microneedle arrays; vaccine delivery; Etching; Fabrication; Fluid flow; Needles; Radio frequency; Silicon; Sulfur hexafluoride; deep reactive ion etching; microneedle arrays; vaccine delivery;
Conference_Titel :
Nanoscience and Nanotechnology (ICONN), 2010 International Conference on
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4244-5261-3
Electronic_ISBN :
978-1-4244-5262-0
DOI :
10.1109/ICONN.2010.6045229
