• DocumentCode
    1817329
  • Title

    Quantum entanglement for optical lithography and microscopy beyond the Rayleigh limit

  • Author

    Bentley, S.J. ; Boyd, R.W. ; Nagasako, E.M. ; Agarwal, Girish S.

  • Author_Institution
    Inst. of Opt., Rochester Univ., NY, USA
  • fYear
    2001
  • fDate
    11-11 May 2001
  • Firstpage
    68
  • Lastpage
    69
  • Abstract
    Summary form only given. Recently, Boto et al. (see Phys. Rev. Lett., vol. 85, p. 2773, 2000) showed that using N entangled photons and an N-photon responsive lithographic recording medium, one could potentially write lithographic gratings with a resolution that is N times better than the classical Rayleigh criterion. An anticipated experimental difficulty is that such beams are weak, yet strong fields are needed to excite the N-photon absorption process. For the case of N=2, which was described in detail by Boto et al., we propose a method to overcome this problem. We also propose to use this idea "in reverse" to perform microscopy with better resolution than aloowed by the Rayleigh limit.
  • Keywords
    image resolution; optical microscopy; optical parametric amplifiers; optical pumping; photolithography; quantum optics; N-photon absorption process; N-photon responsive lithographic recording medium; Rayleigh limit; classical Rayleigh criterion; entangled photons; lithographic gratings; optical lithography; optical microscopy; quantum entanglement; resolution; strong fields; Computer aided manufacturing; Dielectric measurements; Dielectric substrates; Laboratories; Lithography; Optical computing; Optical microscopy; Optical scattering; Quantum entanglement; Spontaneous emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2001. QELS '01. Technical Digest. Summaries of Papers Presented at the
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-663-X
  • Type

    conf

  • DOI
    10.1109/QELS.2001.961865
  • Filename
    961865