• DocumentCode
    1817577
  • Title

    Session M2 Microwave, millimeter wave & optical MEMS 2

  • Volume
    1
  • fYear
    2008
  • fDate
    13-15 Oct. 2008
  • Firstpage
    89
  • Lastpage
    89
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • Keywords
    Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2008. CAS 2008. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-2004-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2008.4703334
  • Filename
    4703334
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1817577