Title :
Session M2 Microwave, millimeter wave & optical MEMS 2
Abstract :
Start of the above-titled section of the conference proceedings record.
Keywords :
Micromechanical devices;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703334
