DocumentCode :
1817928
Title :
Electrical Doping Of Gassensitive, Semiconducting Ga/sub2/O/sub3/ Thin Films
Author :
Frank, J. ; Fleischer, M. ; Meixner, H.
Volume :
2
fYear :
1995
fDate :
25-29 June 1995
Firstpage :
850
Lastpage :
853
Keywords :
Conducting materials; Conductivity; Crystallization; Gas detectors; Semiconductivity; Semiconductor device doping; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.721972
Filename :
721972
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1817928
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