DocumentCode
1817945
Title
Session Mb 1 MEMS / BIO MEMS technology & applications 1
Volume
1
fYear
2008
fDate
13-15 Oct. 2008
Firstpage
141
Lastpage
141
Abstract
Start of the above-titled section of the conference proceedings record.
Keywords
Micromechanical devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-2004-9
Type
conf
DOI
10.1109/SMICND.2008.4703350
Filename
4703350
Link To Document