Title :
Investigations on energy scavenging methods using MEMS devices
Author :
Pasquale, G. De ; Somà, A.
Author_Institution :
Mech. Dept., Politec. di Torino, Torino
Abstract :
This work is focused on the design approach to MEMS devices for the energy scavenge; two conversion strategies from vibrations to voltage are considered: electrostatic capacitive and piezoelectric. Main analytical relations for capacitive structures are derived and used for a quantitative estimation of the power scavenged with respect to the operation frequency and to eventual applications.
Keywords :
electrostatics; energy harvesting; micromechanical devices; piezoelectricity; MEMS devices; conversion strategies; electrostatic capacitive; energy scavenging methods; piezoelectric; quantitative estimation; vibrations to voltage; Capacitive sensors; Capacitors; Electrostatics; Energy conversion; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Resonance; Vibrations; Voltage; electrostatics; energy harvesting; energy scavenging; piezoelectricity;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703357
