DocumentCode
1818354
Title
Technological fabrication of the humidity sensors on nanostructurated membranes
Author
Bragaru, Adina ; Miu, Mihaela ; Craciunoiu, Florin ; Kleps, Irina ; Simion, Monica ; Ignat, Teodora
Author_Institution
Nat. Inst. for Res. & Dev. in Microtechnologies, Bucharest
Volume
1
fYear
2008
fDate
13-15 Oct. 2008
Firstpage
189
Lastpage
192
Abstract
Recently, for sensors application, porous silicon has received a great attention due to the high specific surface area and the easy fabrication using standard processes from silicon technology. The design and technology for a resistive humidity sensor full integrated on silicon is presented in this paper. This sensor integrates both the interdigitated microelectrodes array for detection, and the resistance for accelerated desorbtion process controlled by a temperature sensor.
Keywords
humidity sensors; nanotechnology; temperature sensors; humidity sensors; nanostructurated membranes; silicon technology; technological fabrication; temperature sensor; Acceleration; Biomembranes; Fabrication; Humidity; Microelectrodes; Sensor arrays; Silicon; Surface resistance; Temperature control; Temperature sensors; Humidity sensor; interdigitated microelectrodes; silicon membrane;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-2004-9
Type
conf
DOI
10.1109/SMICND.2008.4703365
Filename
4703365
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