Physics-based SS and SSLS variability assessment of microwave devices through efficient sensitivity analysis

A general framework for the physics-based small-change sensitivity analysis is presented, aimed at the variability assessment of SS and SS-LS device performances as a function of process parameters. The proposed technique is based on the linearization of a physical device model (e.g. drift-diffusion) around a nominal process parameter, and on the evaluation of relevant Green´s functions linking the parameter variations in each point of the device to external, circuit-oriented performances, yielding e.g. the sensitivity of the elements of the SS Y parameters and SS-LS Y conversion matrix. This technique allows for a considerable saving of simulation time with respect to repeated incremental analyses.