Title :
Design and fabrication of Fresnel lenses
Author :
Kusko, M. ; Avram, A. ; Apostol, D.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest
Abstract :
In this paper are presented the results on design, simulation and fabrication of Fresnel lenses. In the theoretical section the design concepts and BPM simulations results are presented, and in the experimental section details about controlled RIE etching process of various materials are provided. Much attention is dedicated to find the etching rate corresponding to etching process parameters and substrate type.
Keywords :
Fresnel diffraction; lenses; sputter etching; Fresnel lenses; RIE etching process; beam propagation method; Etching; Fresnel reflection; Lenses; Microoptics; Optical design; Optical device fabrication; Optical propagation; Optical refraction; Optical variables control; Plasma simulation; BPM simulation; Fresnel lens; RIE;
Conference_Titel :
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-2004-9
DOI :
10.1109/SMICND.2008.4703451
