• DocumentCode
    1820430
  • Title

    Design and fabrication of Fresnel lenses

  • Author

    Kusko, M. ; Avram, A. ; Apostol, D.

  • Author_Institution
    Nat. Inst. for R&D in Microtechnologies, Bucharest
  • Volume
    2
  • fYear
    2008
  • fDate
    13-15 Oct. 2008
  • Firstpage
    445
  • Lastpage
    448
  • Abstract
    In this paper are presented the results on design, simulation and fabrication of Fresnel lenses. In the theoretical section the design concepts and BPM simulations results are presented, and in the experimental section details about controlled RIE etching process of various materials are provided. Much attention is dedicated to find the etching rate corresponding to etching process parameters and substrate type.
  • Keywords
    Fresnel diffraction; lenses; sputter etching; Fresnel lenses; RIE etching process; beam propagation method; Etching; Fresnel reflection; Lenses; Microoptics; Optical design; Optical device fabrication; Optical propagation; Optical refraction; Optical variables control; Plasma simulation; BPM simulation; Fresnel lens; RIE;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2008. CAS 2008. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-2004-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2008.4703451
  • Filename
    4703451
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1820430