• DocumentCode
    1820727
  • Title

    Characterization of MOS transistors integrated on high resistivity silicon with a DSSD process

  • Author

    Batignani, G. ; Forti, F. ; Giorgi, M. ; Rampino, G. ; Tritto, S. ; Bosisio, L. ; Marina, R. Della

  • Author_Institution
    Ist. Nazionale di Fisica Nucl., Pisa, Italy
  • Volume
    1
  • fYear
    1996
  • fDate
    2-9 Nov 1996
  • Firstpage
    407
  • Abstract
    We have fabricated MOS transistors with a commercial double sided silicon detector (DSSD) process, on the same wafer as the detector. These devices have been simulated and measured in the lab both in the DC characteristics and in the noise figures
  • Keywords
    MOSFET; detector circuits; nuclear electronics; silicon radiation detectors; DC characteristics; MOS transistors; Si; commercial double sided silicon detector process; high resistivity silicon; noise figures; Conductivity; Decision support systems; Detectors; Dielectric substrates; Doping profiles; Implants; MOS capacitors; MOS devices; MOSFETs; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium, 1996. Conference Record., 1996 IEEE
  • Conference_Location
    Anaheim, CA
  • ISSN
    1082-3654
  • Print_ISBN
    0-7803-3534-1
  • Type

    conf

  • DOI
    10.1109/NSSMIC.1996.591012
  • Filename
    591012