Human-operated 3D micro-manipulator with haptic feedback

In this work we present a tool for human-controlled 3D assembly of micro-objects. The setup consists of a MEMS-based microgripper with integrated force sensor, piezo-positioners and a stereo micro-scope, all available commercially. Both position and opening of the gripper (3.5-DOF) can be intuitively controlled by the human operator through a Phantom haptic interface using only one hand. Additionally the gripper´s tilt angle can be adjusted. The measured force is presented to the operator, allowing secure, force-controlled gripping manipulation as well as exploration of unknown micro-environments. All features are experimentally evaluated and a two-layer pyramid is constructed out of four polystyrol beads (diameter: 45 μm) in an aqueous environment.