• DocumentCode
    1820854
  • Title

    SOI active pixel detectors of ionizing radiation - technology & design development

  • Author

    Marczewski, J. ; Domanski, K. ; Grabiec, P. ; Grodner, M. ; Jaroszewicz, B. ; Kociubinski, A. ; Kucharski, K. ; Tomaszewski, D. ; Kucewicz, W. ; Kuta, S. ; Machowski, W. ; Niemiec, H. ; Sapor, M. ; Caccia, M.

  • Author_Institution
    Inst. of Electron Technol., Warsaw, Poland
  • Volume
    1
  • fYear
    2003
  • fDate
    19-25 Oct. 2003
  • Firstpage
    365
  • Abstract
    This paper addresses the development of a novel monolithic active pixel image sensor based on SOI technology. The test active pixel matrices have been recently manufactured and are under extensive examination. The paper describes an idea of the device and shows the most recent test results.
  • Keywords
    CMOS image sensors; silicon radiation detectors; silicon-on-insulator; SOI active pixel detectors; Si-SiO2; image sensor; ionizing radiation; CMOS technology; Circuits; Conductivity; Ionizing radiation; Manufacturing; Radiation detectors; Semiconductor films; Silicon on insulator technology; Substrates; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record, 2003 IEEE
  • ISSN
    1082-3654
  • Print_ISBN
    0-7803-8257-9
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2003.1352064
  • Filename
    1352064
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1820854