Title :
Amorphous waveguides for high index photonic circuitry
Author :
Lipka, T. ; Harke, A. ; Horn, O. ; Amthor, J. ; Müller, J.
Author_Institution :
Hamburg Univ. of Technol., Hamburg
Abstract :
Photonic wires, channel and rib waveguides as well as tapers were fabricated with amorphous silicon showing low propagation loss. Material analysis and RTA was carried out in order to tune the refractive index post deposition.
Keywords :
amorphous semiconductors; elemental semiconductors; optical losses; optical waveguides; rapid thermal annealing; refractive index; rib waveguides; silicon; RTA; Si:H; amorphous silicon; channel waveguides; photonic wires; propagation loss; refractive index; rib waveguides; Amorphous materials; Amorphous silicon; Circuits; Crystalline materials; Crystallization; Optical materials; Optical refraction; Optical waveguides; Refractive index; Temperature; (230.7380) Waveguides, channeled; (310.3840) Materials and process characterization;
Conference_Titel :
Optical Fiber Communication - incudes post deadline papers, 2009. OFC 2009. Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-2606-5
Electronic_ISBN :
978-1-55752-865-0
