DocumentCode
1822001
Title
High pitch metal-on-glass technology for pad pitch adaptation between detectors and readout electronics
Author
Ullán, Miguel ; Lozano, Manuel ; Campabadal, Francesca ; Fleta, Celeste ; Garcìa, Carmen ; González, Francisco ; Bernabeu, Josè
Author_Institution
Centro Nacional de Microelectron., CNM-CSIC, Barcelona, Spain
Volume
1
fYear
2003
fDate
19-25 Oct. 2003
Firstpage
598
Abstract
Modern High Energy Physics and Astrophysics strip detectors have increased channel density to levels in which their connection with the readout electronics has become very troublesome due to high pad pitch. Also, direct wire bonding is prevented by the fact that typically detector´s pad pitch and electronics´ pad pitch do not agree. A high pitch metal-on-glass technology is presented, that allows pad pitch adaptation between detectors and readout electronics. It consists of high density metal lines on top of an insulating glass substrate. A photoresist layer is deposited covering the metal tracks for passivation and protection The technology is tested for conductivity, bondability, bonding pull force, peel of, and radiation hardness, and it is an established technology in the clean room of the CNM Institute in Barcelona. This technology has been chosen by the ATLAS Collaboration for the pad pitch adapters of the SCT Endcap Modules, by the Compton Camera Collaboration, and by other REP experiments for the interconnection between detectors and readout electronics.
Keywords
nuclear electronics; semiconductor counters; channel density; detectors; direct wire bonding; high pad pitch; high pitch metal-on-glass technology; insulating glass substrate; pad pitch adaptation; photoresist layer; readout electronics; Astrophysics; Bonding forces; Collaboration; Detectors; Glass; Insulation; Readout electronics; Resists; Strips; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium Conference Record, 2003 IEEE
ISSN
1082-3654
Print_ISBN
0-7803-8257-9
Type
conf
DOI
10.1109/NSSMIC.2003.1352113
Filename
1352113
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