Title :
Evaluation of the oscillation-based test methodology for micro-electro-mechanical systems
Author :
Beroulle, V. ; Bertrand, Y. ; Latorre, L. ; Nouet, P.
Author_Institution :
Lab. d´´Informatique, Robotique et de Microelectronique de Montpellier, France
Abstract :
In this paper, Oscillation-based Test Methodology (OTM) is evaluated in the context of MEMS testing. Both qualitative and quantitative evaluations of fault coverage are discussed and the impact of test on production yield is addressed. This article also introduces the Lorentz force as a low-cost stimulus for electro-mechanical structures.
Keywords :
fault simulation; integrated circuit testing; integrated circuit yield; magnetic sensors; magnetometers; micromechanical devices; microsensors; oscillators; Lorentz force; MEMS magnetometer; MEMS testing; closed-loop oscillator design; fault coverage; fault simulation; integrated circuit testing task; micro-electro-mechanical systems; oscillation-based test methodology; production yield; resonant magnetic sensors; sensor modeling; tolerance ranges; Circuit faults; Circuit testing; Costs; Magnetic sensors; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Packaging; Production; System testing;
Conference_Titel :
VLSI Test Symposium, 2002. (VTS 2002). Proceedings 20th IEEE
Print_ISBN :
0-7695-1570-3
DOI :
10.1109/VTS.2002.1011177
